February 16, 2010 - Tokyo Electron (TEL) and imec have agreed to extend their collaboration on Extreme Ultraviolet Lithography (EUVL), the most advanced imaging technique in the semiconductor industry. The continued engagement between TEL and imec focuses on developing advanced EUVL processes for the 22nm node and beyond. This activity includes exploring new approaches to improve RLS (resolution, line width roughness and sensitivity), one of the most challenging critical issues in EUVL, as well as optimizing coater/developer processes.

Imec and TEL have been engaged in EUV R&D in Leuven, Belgium since 2006, using ASML’s EUV Alpha Demo Tool (ADT). The partners have been collaboratively assessing photoresists and optimizing coater/developer recipes for EUV processes. So far, resolutions of 28-30nm have been successfully demonstrated on ASML’s EUV ADT. Critical dimension (CD) uniformity optimization studies have resulted in typical intra-wafer variations below 1.5nm (3-sigma) for 28nm resolution. Electrically functional 0.099μm2 22nm node 6-transistor SRAM cells have also been demonstrated using EUVL for contact and metal1 level patterning.

As part of the extended collaboration, TEL will deliver a CLEAN TRACK™ LITHIUS Pro™, the company’s most advanced coater/developer, to interface with ASML’s newest EUV scanner, the NXE:3100, in imec's 300mm cleanroom expansion. The cleanroom extension opens in June 2010 and scanner delivery is planned for Q4/2010.

About imec
Imec performs world-leading research in nano-electronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society.
Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China and Japan. Its staff of more than 1,750 people include over 650 industrial residents and guest researchers. In 2008, imec's revenue (P&L) was 270 million euro.
Further information on imec can be found at www.imec.be.

Imec is a registered trademark for the activities of imec International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (imec vzw supported by the Flemish Government), imec the Netherlands (Stichting imec Nederland, part of Holst Centre which is supported by the Dutch Government) and imec Taiwan (imec Taiwan Co.).