The following changes in important personnel will become effective on July 1, 2010.

1. Executive Officers as of July 1, 2010

Tetsuro Higashi	Chairman of the Board
Hiroshi Takenaka	President & CEO
Hirofumi Kitayama	Executive Vice President, General Manager, Manufacturing Division (Quality)
Kenji Washino	Executive Vice President, General Manager, Corporate Business Strategy
Hikaru Ito	Executive Vice President, General Manager, SPE
Mitsuru Onozato	Executive Vice President, General Manager, FPD Division
Takashi Nakamura	Senior Vice President, General Manager, Corporate Administration Division, Compliance/Internal Control
Masami Akimoto	Senior Vice President, General Manager, System Development Division
Takashi Ito	Senior Vice President, General Manager, PVE
Chiaki Yamaguchi	Senior Vice President, General Manager, SPE Sales Division
Yutaka Nanasawa	VP & General Manager, HR/Human Resources Development Center/ Finance/Export and Logistics Control
Yoshiteru Harada	VP & General Manager, General Affairs/Accounting
Tetsuro Hori	VP & General Manager, Legal/Intellectual Property
Toshihiko Nishigaki	VP & General Manager, CT BU
Seisu Ikeda	VP & General Manager, SPS BU
Hideyuki Tsutsumi	VP & General Manager, ES BU
Takeshi Okubo	VP & General Manager, TPS BU / SD BU
Kiyoshi Sunohara	VP & General Manager, FS BU
Masaaki Hata	VP & General Manager, Taiwan Sales, SPE Sales Division
Tsuguhiko Matsuura	VP & General Manager, FPD BU
Gishi Chung	VP & General Manager, SPE Process Development Division
Shigetoshi Hosaka	VP & General Manager, Corporate Development Division

Changes of Executive Officers

Name	Continuing Position	New Position	Current Position
Kenji Washino	EVP, Corporate Business Strategy Corporate Director,  Tokyo Electron TS Ltd. Corporate Director,  Tokyo Electron Kyushu Ltd. Corporate Director,  Tokyo Electron Technology  Development Institute Inc. Corporate Director,  Tokyo Electron Software  Technologies Ltd. Chairman,  Tokyo Electron  Massachusetts, LLC Chairman,  TEL Venture Capital,Inc. Chairman,  TEL Epion Inc. Corporate Director,  TEL Technology Center,  America, LLC Corporate Director,  Timbre Technologies, Inc.	-	General Manager of Marketing Division
Hiroki Takebuchi	Senior Corporate Staff	Chairman of the Board,  Tokyo Electron Miyagi Ltd.	SVP & General Manager,  Corporate Strategic  Planning
Yoshiteru Harada	-	VP & General Manager,  General Affairs/Accounting Treasurer,  TEL Technology Center,  America, LLC CFO,  Timbre Technologies, Inc.	SVP & General Manager,  Tokyo Electron Kyushu  Ltd.
Yoshikazu Nunokawa	-	SVP & General Manager,  Administration Division,  Tokyo Electron AT Ltd. and SVP & General Manager,  Director of the New Miyagi  Plant Startup Dept.,  Tokyo Electron Miyagi Ltd.	VP & General Manager,  Finance/ Export and  Logistics Control Corporate Director,  TEL Venture Capital,  Inc. Corporate Director,  TEL Epion Inc. Corporate Director,  Tokyo Electron India  Private Ltd. (Effective on June 16) Corporate Director,  Tokyo Electron Agency  Ltd. (Effective on June 17) Corporate Director,  Tokyo Electron BP Ltd.
Yutaka Nanasawa	VP & General Manager,  HR/Human Resources  Development Center	VP & General Manager,  Finance/ Export and  Logistics Control Corporate Director,  TEL Venture Capital, Inc. Corporate Director,  TEL Epion Inc. Corporate Director,  Tokyo Electron India  Private Ltd. (Effective on June 16) Corporate Director,  Tokyo Electron Agency  Ltd. (Effective on June 17) Corporate Director,  Tokyo Electron BP Ltd.	VP & General Manager,  General  Affairs/Accounting

2．Personnel Changes for the Director of Subsidiaries
(1) Personnel Changes for the Representative Director of Subsidiaries

Name	Continuing Position	New Position	Current Position
Hirofumi Kitayama	Chairman of the Board,  Tokyo Electron Tohoku Ltd. Chairman of the Board,  Tokyo Electron Technology  Development Institute, Inc. Chairman of the Board,  Tokyo Electron PS Ltd. Corporate Director,  Tokyo Electron AT Ltd. Corporate Director,  Tokyo Electron Kyushu Ltd. Corporate Director,  Tokyo Electron TS Ltd. Corporate Director,  Tokyo Electron Software  Technologies Ltd. Chairman,  Tokyo Electron Korea Solution Ltd. Corporate Director,  Tokyo Electron (Shanghai) Ltd. Corporate Director,  Tokyo Electron (Shanghai) Logistic  Center Ltd.	(Effective on July 1) President & Representative Director,  Tokyo Electron Miyagi Ltd.	-
Shojiro Mori	President & Representative Director,  Tokyo Electron BP Ltd.	(Effective on June 16) President & Representative Director,  Tokyo Electron Agency Ltd.	-

3．Other Personnel Changes as of July 1, 2010

Name	Continuing Position	New Position	Current Position
Akihisa Sekiguchi	-	General Manager of Marketing Division	VP, Tokyo Electron U.S. Holdings, Inc. and Process Integration, Marketing
Yukio Saeki	-	VP & General Manager,  Tokyo Electron Kyushu Ltd.	Director of Accounting Dept. Treasurer,  TEL Technology Center,America,  LLC CFO, Timbre Technologies, Inc.
Ryoji Omata	-	Director of Accounting Dept.	Director of Accounting Dept.  Tokyo Electron AT Ltd.
Eiichi Takao	-	Director of Legal Dept.	Senior Manager, Legal Dept.