TEMEON-C is to test capacitive MEMS devices such as Accelerometer, Gyroscope and others. TEL's unique and original technology eliminates the parasitic capacitance to measure only between target nodes at less than 1 femto farad accuracy. Dynamic capacitance are measured while the mass is oscillated and it calculates its resonant frequency and Q value automatically. Even the tiny bias noise at cross-axis of Gyroscope can be measured using TEL's original noise-less ultra-sensitive circuit.

Applications

• Capacitive MEMS devices such as Accelerometers, Pressure Sensors, Gyroscopes, Si microphones
• Applicable to Wafer Level Test and Bare Die Test post dicing
• Effective for characterization in development environments and volume production testing

Features

• Femto Farad capacitance measurement accuracy using TEL's original technology to eliminate parasitic capacitance
• Dynamic capacitance measurement capability in addition to high precision static capacitance measurement

• *TEMEON is a trademark of Tokyo Electron Limited