Field Solutions

High productivity, utilization and quality are crucial elements for achieving optimal product yield. It is critical to have committed and expertly trained service professionals available to take care of your field solutions service and product needs.

In the dynamic and ever-changing business environment of the semiconductor equipment industry, Tokyo Electron offers lifetime support to keep your new, mature, and used systems running at their peak.


  • Semiconductor Production Equipment
    • Thermal Processing
    • Coater/Developers
    • Etch system
    • Surface Preparation system
    • Single Wafer Deposition
    • Test system
    • Wafer Bonding/Debonding
    • SiC Epitaxial CVD System
    • Gas Cluster Ion Beam System
    • Advanced Packaging
  • Flat Panel Display Equipment
    • FPD Coater/Developer
    • FPD Etch/Ash system
    • Inkjet printing system for manufacturing OLED panels
  • Field Solutions
    • Used Equipment
    • Modifications
    • Service Support
    • Spare Parts
  • Chip Making Process